Fluorine
Gas Factfile
Fluorine (F2) is a a highly toxic, pale yellow diatomic gas.
Fluorine is produced by electrolyzing a solution of potassium fluoride in anhydrous hydrogen fluoride. It is used as chemical feedstock for a variety of fluorinated compounds such as sulfur hexafluoride, nitrogen trifluoride, boron trifluoride, tungsten hexafluoride, etc.
High purity Fluorine gas is the highest performance cleaning gas available, improving productivity on CVD tools, reducing energy consumption and environmental impact, with ZERO Global Warming Potential.
| UN Number | 1045 |
| CAS Number | 7782-41-4 |
| EC Number | 231-954-8 |
| DOT Label | Poison gas, Oxidizing, Corrosive |
| Hazard labels required | ADR Class 2.3, DOT Class 2.3(5.1, 8) |
Where is it used ?
Flouorine is used in various applications. Here are some examples.
Semiconductor
Used in manufacturing for a variety of applications, including plasma etching, MEMs fabrication, and flat panel display production.
Energy
Used in the insulation of electric towers.
